Onto Innovation Takes $720M Stake in Rigaku to Bolster Semiconductor Process Control

  • Onto Innovation acquired a 27% stake in Rigaku for $720M (113.08B yen) from Atom Investment
  • Deal closes strategic collaboration first announced in April 2026 on X-ray technologies for semiconductor manufacturing
  • Onto will nominate a director to Rigaku's board but won't consolidate financial results
  • Investment focuses on advancing process control for complex 3D architectures and exotic materials

The deal reflects growing demand for advanced process control solutions as semiconductor manufacturing shifts to more complex 3D structures. With $720M invested, Onto is positioning itself at the intersection of materials science and manufacturing automation - a critical junction as chipmakers push toward high-volume production of next-generation technologies.

Integration Challenges
How Onto will balance minority ownership with strategic influence in Rigaku's operations...
Technology Roadmap
The pace at which joint X-ray solutions reach commercialization for next-gen semiconductor architectures...
Market Positioning
Whether this investment strengthens Onto's competitive position against traditional metrology equipment providers...